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研制出定容法正压漏孔校准装置。采用满量程分别为133 Pa(差压式)、1.33×105Pa(绝压式)的两台高精度电容薄膜真空计测量压力变化,通过全金属密封结构减小定容室漏放气对测量结果的影响;采用高精度半导体双级恒温系统获得了296±0.02 K的恒温效果,减小温度对漏孔漏率的影响;通过三个不同的标准体积作为定容室,拓宽装置的校准范围。研究结果证实,研制的校准装置仅采用定容法实现了3×10-1~4×10-8Pa·m3/s的校准范围,合成标准不确定度为1.2%~3.2%。
Developed a constant volume positive pressure leak calibration device. Using full-scale 133 Pa (differential pressure), 1.33 × 105Pa (absolute pressure) of the two high-precision capacitance film gauge to measure changes in pressure gauge, through the all-metal seal structure to reduce the leakage of the test chamber leak gas measurement results The effect of constant temperature of 296 ± 0.02 K was obtained by using a high-precision semiconductor two-stage thermostatic system to reduce the influence of temperature on the leakage rate of the leaky hole. The calibrating range of the device was broadened by using three different standard volumes as fixed-volume chambers. The results of the study confirm that the calibrating device developed only achieves the calibration range of 3 × 10-1 ~ 4 × 10-8Pa · m3 / s by constant volume method, and the synthetic standard uncertainty is 1.2% ~ 3.2%.