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阐述了利用Langmuir双探针诊断等离子体参数的基本原理,对圆柱腔中的空气辉光放电等离子体进行了双探针诊断,通过实验测得伏安特性曲线,计算得出等离子体密度和电子温度。分析了密度参数变化与放电电流大小之间的关系。最后将诊断结果与准光腔系统进行比较,二者虽略有差别,但差别不大,且变化趋势一致。验证了采用本双探针系统诊断辉光放电等离子体密度的可靠性。
The principle of using Langmuir dual probe to diagnose plasma parameters is described. The dual-probe diagnosis of air glow discharge plasma in a cylindrical cavity is made. The volt-ampere characteristic curve is measured experimentally to calculate the plasma density and electron temperature. The relationship between the change of density parameter and the discharge current was analyzed. Finally, the diagnostic results compared with the quasi-optical cavity system, although the two slightly different, but not very different, and the same trend. The reliability of using this dual probe system to diagnose the density of glow discharge plasma was verified.