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静电电压表对测量交直流高压有着非常重要的作用。为了实现高电压静电电压表的精确测量,提出并制备了一种采用法布里珀罗(FP)腔干涉原理的静电电压传感器。所设计的传感器电极与高压电极构成一组静电电压测量电极,此传感器的FP腔由光纤准直器和外侧镀铝的聚酯膜构成,当在高压电极施加载荷时,聚酯膜与高压电极之间产生均匀电场,在电场力作用下聚酯膜产生形变,从而改变FP腔的腔长,造成FP传感器的输出光谱偏移,采用相位解调法获得高压电极上施加的载荷,实现电压的静电测量。实验结果表明:可实现5~16kV直流高压和交流高压有效值的测量,5~10kV范围测量精度为1.21%,10~16kV的测量精度为0.61%。此传感器满足高电压的测量要求。
Electrostatic voltmeter on the measurement of AC and DC has a very important role. In order to achieve accurate measurement of high-voltage electrostatic voltmeter, a Fabry-Perot (FP) cavity interference principle electrostatic voltage sensor is proposed and prepared. The designed sensor electrode and high voltage electrode form a set of electrostatic voltage measurement electrode. The FP cavity of this sensor consists of a fiber collimator and an outer aluminum-plated polyester film. When a load is applied to the high-voltage electrode, the polyester film and the high-voltage electrode A uniform electric field is generated, the polyester film is deformed under the action of an electric field force to change the cavity length of the FP cavity, resulting in the output spectrum deviation of the FP sensor, and the phase demodulation method is used to obtain the load applied on the high-voltage electrode to achieve the voltage Electrostatic measurement. The experimental results show that the measurement accuracy of DC high voltage and AC high voltage of 5 ~ 16kV can be achieved. The measurement accuracy is 1.21% in 5 ~ 10kV range and 0.61% in 10 ~ 16kV range. This sensor meets the high voltage measurement requirements.