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用Ｘ射线衍射分析研究了氮分区对ＰＥＭＳＩＰ法ＴｉＮ涂层相组成的影响，结果表明，随着氮分压增加，涂层相组成朝着富氮相及其含量增加的方向发展，变化趋势为：αＴｉ→（αＴｉ＋Ｔｉ２Ｎ）→（Ｔｉ２Ｎ＋ＴｉＮ）→ＴｉＮ。氮分压对涂层硬度的影响主要是由氮分压影响涂层相组成而引起的，其中，由Ｔｉ２Ｎ和ＴｉＮ两相组成的膜硬度最高。
The effect of nitrogen partition on the phase composition of TiN coating by PEMSIP method was studied by X-ray diffraction. The results showed that the phase composition of the coating developed toward the nitrogen-rich phase and its content increased with the increase of partial pressure of nitrogen, the trend was : ΑTi → (αTi + Ti2N) → (Ti2N + TiN) → TiN. The effect of nitrogen partial pressure on the hardness of the coating is mainly caused by the influence of the partial pressure of nitrogen on the phase composition of the coating, in which the film composed of two phases of Ti2N and TiN has the highest hardness.