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电场传感器需要通过校准才能应用于电场测量,校准系统的不确定度反映了传感器校准结果的可信赖程度,所以需要评定校准系统的不确定度。横电磁波(TEM)小室具有成本低、内部电场均匀性好、幅值较高等优点,适用于产生标准电场,进行电场传感器的校准工作。针对光电集成电场传感器的校准需求,建立了一套TEM小室电场传感器校准系统,分析了该系统产生标准电场的各项影响因素包括场均匀系数、TEM小室特征阻抗实部、半空间距离和净输入功率,计算了这些影响因素的标准不确定度。通过不确定度合成,得出TEM小室校准系统在≥95.45%的置信概率下,产生标准电场的扩展不确定度为5.9%,满足校准电场传感器的需求。
The electric field sensor needs calibration to be applied to the electric field measurement. The uncertainty of the calibration system reflects the reliability of the sensor calibration results. Therefore, the uncertainty of the calibration system needs to be evaluated. Transverse electromagnetic wave (TEM) chamber has the advantages of low cost, good internal electric field uniformity and high amplitude, and is suitable for generating standard electric field and calibrating electric field sensor. Aiming at the calibration requirements of photoelectric integrated electric field sensor, a set of calibration system of TEM cell electric field sensor was established. The influencing factors of the standard electric field generated by this system were analyzed including field uniform coefficient, real part of TEM cell impedance, half-space distance and net input Power, calculate the standard uncertainty of these factors. Through the synthesis of the uncertainty, the expanded uncertainty of the standard electric field generated by the TEM cell calibration system with the confidence probability of ≥95.45% is 5.9%, which meets the needs of the calibration electric field sensor.