一、引言在精密测量线位移时,往往要求读数当量为0.1微米。为获得0.1微米读数当量,通常至少需一百等分光电信号。最初,电子学工作者往往单从电子学细分着手,因为从电子学角度来看,对正弦信号实现高倍细分并不存在困难。然而,实际上由莫尔条纹给出的光电信号是随机变化的,包含着谐波成分,不是严格的正弦波,并且含有直流电子,用于判向的二相信号相位差也不是严格的90°;在量程范围内信号也不一致。这些都严重地影响高倍细分的准确度和可靠性。至今,比较切实可靠的电子细分 First, the introduction In the precision measurement of line displacement, often require reading equivalent to 0.1 microns. To obtain a reading of 0.1 microns equivalent, usually at least one hundred percent of the optical signal. Initially, electronics workers tended to start with electronics subdivision alone, since there is no difficulty with high-resolution subdivision of a sinusoidal signal from an electronics standpoint. However, the photoelectric signals actually given by the moiré fringes vary randomly, contain harmonic components, not strictly sinusoidal, and contain direct current electrons. The phase difference of the two-phase signals used in the decision is not strictly 90 °; The signal is not consistent within the range. These are serious implications for the accuracy and reliability of high resolution subdivisions. So far, more reliable electronic subdivision