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针对高功率射频板条CO2激光器铜电极表面放电氧化、受射频放电的电子溅射,致使电极表面不光滑,辉光放电不均匀,光波导损耗严重等问题。利用Al2O3波导介质膜具有的反常色散效应、耐高温能力强的特点,采用磁控溅射镀膜技术对激光器电极表面先镀Al,而后阳极氧化获得Al2O3波导介质膜。分析了磁控溅射工艺对膜层结构的影响,测量了镀膜电极对CO2激光的反射率,并进行了放电实验检测。结果表明,溅射功率为250 W时可得到致密的镀膜层结构;厚度6μm的Al2O3薄膜,对波长10.6μm的CO2激光波导反射率最高达75%;电极镀膜后激光器输出功率在占空比为30%时为700 W,占空比为60%时达到了1300 W。
Aiming at the problems of oxidation and radio frequency discharge on the copper electrode of high power RF slab CO2 laser, the surface of the electrode is not smooth, the glow discharge is not uniform and the optical waveguide is seriously damaged. Al 2 O 3 waveguide dielectric films were obtained by magnetron sputtering coating on the surface of the laser electrode by using the anomalous dispersion effect of Al 2 O 3 waveguides and high temperature resistance. The influence of magnetron sputtering process on the structure of the film was analyzed. The reflectivity of the coated electrode to CO2 laser was measured and the discharge test was carried out. The results show that the dense coating structure can be obtained when the sputtering power is 250 W. When the thickness is 6μm, the reflectivity of CO2 laser waveguide with the wavelength of 10.6μm is up to 75%. The output power of the laser after the electrode coating is in the range of 700 W at 30% and 1300 W at 60% duty cycle.