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Silicon clusters are produced by a new chendcal method. Comparing with theprepaxation method using laser evaporation, large amoun of silicon clusters could havebeen obtained by this cheforcal decomposition of silicane and the clusters produced is sta-ble in atm0sphere. The FAB-MS spectra of the clusters is also discussed in this paper.
Silicon clusters are produced by a new chendcal method. Comparing with theprepaxation method using laser evaporation, large amoun of silicon clusters could havebeen obtained by this cheforcal decomposition of silicane and the clusters produced in sta- ble in atm0sphere. The FAB-MS spectra of the clusters is also discussed in this paper.