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A swarm analysis technique based on the solution of the Boltzmann equation is usedto derive low energy electron collision cross sections for tetramethylsilane (TMS).The calculatedswarm parameters with this first available cross sections set is consistent with measured values ofthe swarm parameters.Calculations of transport parameters in mixtures of TMS with argon arealso presented.
A swarm analysis technique based on the solution of the Boltzmann equation is used to derive low energy electron collision cross sections for tetramethylsilane (TMS). The calculatedswarm parameters with this first available cross sections set are consistent with measured values of the swarm parameters. Calculations of transport parameters in mixtures of TMS with argon arealso presented.