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软X射线干涉测量是通过软X射线激光经过Mach-zehnder干涉仪完成的,是测量临界面附近等离子体状态的重要方法。基于软X射线多层膜的性能特点,指出软X射线干涉测量的干涉仪各光学元件的入射角越接近正入射越好,分束镜的设计应以其反射率和透过率的乘积为衡量标准。用离子束溅射法制作了类镍银13.9 nm软X射线激光干涉测量所需的分束镜,实测表明其面形精度达到纳米量级,反射率和透过率乘积大于1.6％。
Soft X-ray interferometry is performed by a soft X-ray laser through a Mach-zehnder interferometer and is an important method of measuring the plasma state near the interface. Based on the performance characteristics of the soft X-ray multilayer film, it is pointed out that the closer the incident angle of the optical elements of the interferometer with soft X-ray interferometry is, the better the normal incidence is. The design of the beam splitter should be based on the product of reflectivity and transmittance Metrics. The beamsplitter required for 13.9 nm soft X-ray laser interferometer measurement of nickel-silver-silver was fabricated by ion-beam sputtering. The measured results show that the surface shape accuracy reaches nanometers, and the product of reflectivity and transmittance is more than 1.6%.