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为了满足光学及精密机械领域精密测量的要求,提高微位移器位移量的测量精度,在对传统的接触式干涉仪改造的基础上,采用空间频域算法计算出了白光干涉图零级条纹的中心位置,并根据零级条纹中心的移动量得到待测的微位移量。该方法能够测量连续和阶跃变化的位移量。实验以压电陶瓷微位移装置(PZT)为例,测试了其电压-位移曲线,测量重复性达到1nm。结果表明,该方案稳定有效,不易受噪声和色散的影响,测量重复性好。
In order to meet the requirements of precision measurement in optics and precision machinery, and to improve the measuring accuracy of the displacement of micro-displacement, based on the transformation of the traditional contact interferometer, the spatial frequency domain algorithm is used to calculate the zero-order fringes Center position, and according to zero-streak center of the amount of movement to be measured micro-displacement. This method can measure the displacement of continuous and step change. In the experiment, the piezoelectric-ceramic micro-displacement device (PZT) was taken as an example to test the voltage-displacement curve, and the measurement repeatability reached 1nm. The results show that the scheme is stable and effective, less susceptible to noise and dispersion, and has good repeatability.