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近年来,随着世界电子技术的迅速发展,国内外正在广泛深入地开展晶体、半导体的研究工作:包括单晶表面与内部晶体辐射损伤的研究,晶体内杂质分布的研究晶体内部及表面的缺陷、移动原子、层错、弯曲、结晶表面无序的研究,半导体的离子注入、离子渗杂等的研究。所有这些研究工作都可以通过离子沟道效应、沟道辐射的研究而进行的。高精的沟道辐射的研究和离子沟道效应的研究有赖于多维精密定角仪。 515多维精密定角仪是一种十分精密的仪器,它可以在多维方向上遥控、自动定
In recent years, with the rapid development of electronic technology in the world, research work on crystals and semiconductors has been carried out extensively both at home and abroad, including studies on the radiation damage of single crystal surface and internal crystal, and the study of impurity distribution inside and outside the crystal , Moving atoms, stacking faults, bending, crystal surface disorder research, semiconductor ion implantation, ion-doped studies. All these research work can be carried out by ion channel effect, channel radiation research. The study of high-precision channel radiation and ion channel effects rely on multidimensional precision pyrometer. 515 multi-dimensional precision angle meter is a very sophisticated instrument that can be remote control in multidimensional direction, automatically set