Characteristics of ion debris from laser-produced tin plasma and mitigation of energetic ions by am

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极端紫外平版印刷术为下一代平版印刷术是很有希望的。然而,从生产激光的血浆的碎片,特别地精力充沛的离子,严重地减少极端紫外光学的一生。我们从听血浆测量了离子的特征等到有加倍频率的 Nd 的飞行方法:在 3.5O 的紧张的钇铝柘榴石激光
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