一、前言光反射依赖于表面粗度的这一特性可应用于表面粗度测量。在本文提出的方法中,使用一种称为“光测微计”的仪器(最初是使用该仪器通过检测反射光测量表面的垂直位移)来测量光反射。二、测量原理光测微计(图1)输出的信号 I(槽两侧 I. Introduction Light reflection depends on the surface roughness of this feature can be applied to surface roughness measurements. In the method presented here, light reflectance is measured using an instrument called a “micrometer” that originally used the instrument to measure the vertical displacement of a surface by detecting reflected light. Second, the measurement principle Photometer (Figure 1) output signal I (both sides of the slot