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第三讲:机械真空泵(五)张以忱(东北大学)六、分子真空泵(一)牵引分子泵1.概述分子真空泵是在1911年由德国人盖德(W·Gaede)首先发明的,并阐述了分子泵的抽气理论,使机械真空泵在抽气机理上有了新的突破。分子泵的抽气机理与容积式机械泵靠泵腔容积...
Lecture 3: Mechanical Vacuum Pumps (5) Zhang Yichen (Northeastern University) VI. Molecular Vacuum Pumps (1) Towing Molecular Pumps 1. Overview The molecular vacuum pump was first invented by the German W. Gaede in 1911 and elaborated the theory of pumping of molecular pumps, making the mechanical vacuum pump a new breakthrough in the pumping mechanism. Molecular pump suction mechanism and volumetric mechanical pump by the pump chamber volume ...