论文部分内容阅读
针对一些特殊材料表面形貌的检测需要 ,在原有国产商用激光检测原子力显微镜的基础上 ,设计研制了适用性更广、功能更强的原子显微镜。在不提高驱动电压的前提下 ,采用改进的扫描管 ,将扫描范围从 15μm× 15μm提高到了 50 μm× 50 μm ;改进了原有的微探针扫描模式 ,在探针上施加一驱动的简谐振荡信号 ,使探针发生振荡。由于存在着表面的力梯度 ,当样品与探针距离发生振荡变化时 ,针尖振荡的振幅、频率和位相都会随之改变。用电子信号反馈电路探测此变化 ,就能得到样品表面形貌的信息
In order to detect the surface topography of some special materials, an atomic microscope with wider applicability and stronger function is designed and developed on the basis of the original domestic commercial laser inspection AFM. Without the increase of the driving voltage, the improved scanning tube was used to increase the scanning range from 15μm × 15μm to 50μm × 50μm. The original micro-probe scanning mode was improved and a simple driving probe was applied Harmonic oscillation signal, the probe oscillation. Due to the surface gradient of force, the amplitude, frequency and phase of the tip oscillation change as the distance between the sample and the probe oscillates. With electronic signal feedback circuit to detect this change, you can get the surface morphology of the sample information