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研究了纳米通孔的分布对于表面波方法测量多孔低介电常数薄膜机械特性的影响,提出了用橫观各向同性表征周期性多孔介质材料结构特性的表面波传播理论模型,给出了表面波在low-k薄膜/Si基底分层结构中的传播方程.通过数值算例揭示出表面波在不同传播方向的频散特性,以及low-k薄膜的弹性常数即杨氏模量E,E′和剪切模量G′对频散特性的影响.结果表明E′和G′在垂直于通孔的传播方向不能被测出.
The influence of the distribution of nano-vias on the mechanical properties of porous low dielectric constant films measured by surface wave method is studied. A theoretical model of surface wave propagation is presented, which characterizes the structural properties of periodic porous media by transverse isotropy. The surface Wave propagation in the low-k thin film / Si substrate layered structure.The numerical examples show the dispersion characteristics of surface waves in different propagation directions and the Young’s modulus E, E ’And shear modulus G’ on the dispersion characteristics were studied.The results show that E ’and G’ can not be detected in the direction perpendicular to the through-hole.