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研制了一种用于 WDM光通信系统的多层介质膜 Fabry- Perot腔结构式光开关 ,面积为 1.5 m m× 1.5 m m.光开关采用多层复合膜消除内应力 ,防止产生过度变形 ;中心的十字复合梁有利于提高机械灵敏度 ,降低驱动电压 .体硅腐蚀出的硅杯既减小了光开关的插损 ,又便于端面输入输出光纤的精确对准与固定 ,有效降低封装成本 .制成的开关转换电压为 2 0 V,关态隔离度为 87% ,开态插损为 0 .15 d B.其结构和工艺简单 ,易于与 IC工艺相结合形成规模生产 ,如增加膜的层数便能制成基于 F- P干涉仪结构的滤波器 .
A multi-layer dielectric film Fabry-Perot cavity structure optical switch for WDM optical communication system has been developed. The area of the optical switch is 1.5 mm × 1.5 m m. The optical switch adopts multilayer composite film to eliminate internal stress and prevent excessive deformation. Cross composite beam is conducive to improve the mechanical sensitivity and reduce the driving voltage.Silicon cup silicon body erosion not only reduces the insertion loss of the optical switch, but also facilitate the precise alignment and fixation of the input and output optical fibers on the end face, effectively reducing the packaging cost. Of the switch voltage is 20V, off-state isolation is 87%, open insertion loss is 0.15 d B. Its structure and process is simple, easy to combine with the IC technology to form the scale of production, such as increasing the number of layers of the film It can be made based on F-P interferometer structure of the filter.