所属单位兰州空间技术物理研究所产品简介兰州空间技术物理研究所以真空低温技术为核心,依托表面工程技术国防科技重点实验室的研究成果开发形成了蒸发型、磁控型、离子型、溅射型、多弧型等各种源型的高端真空镀膜设备,主要产品包括高真空磁控溅射镀膜机、高真空卷绕镀膜机、高真空蒸发镀膜机等,可为电子材料与电子信息行业、 Affiliation Lanzhou Institute of Space Technology Physics Lanzhou Institute of Space Technology Physics vacuum cryogenic technology as the core, relying on surface engineering technology National Defense Key Laboratory of Science and Technology research and development of the formation of the evaporation type, magnetron type, ion type, sputtering type , Multi-arc and other types of high-end vacuum coating equipment, the main products include high vacuum magnetron sputtering machine, high vacuum winding coating machine, high vacuum evaporation coating machine, for electronic materials and electronic information industry,