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分布作用振荡器(EIO)是六十年代后期发展起来的一种新型毫米波线性电子注器件。目前,作为一种中,大功率振荡器在整个毫米波波段内已得到广泛应用。分布作用振荡器的主要部分是腔体,是由多个腔片叠加而组成的耦合腔链型慢波电路,如图1所示。为了让电子注与高频场在其中充分地交换能量,必须保证电子注的通过率在百分之九十以上,这样就要求电子注通道小孔的同心度优于0.05毫米。因而如何保证腔体的同心度便成了关键性问题。
Distributed Oscillator (EIO) is a new type of millimeter-wave linear electronic device developed in the late 1960s. At present, as a medium and high power oscillator in the entire millimeter wave band has been widely used. Distribution of the role of the oscillator is the main part of the cavity is composed of a plurality of cavity superposition of the cavity-coupled chain-type slow-wave circuit shown in Figure 1. In order for the electron beam and the high-frequency field to fully exchange energy therein, it is necessary to ensure that the electron beam passing rate is above 90%, thus requiring the electronic concentricity of the passage hole to be better than 0.05 mm. So how to ensure the concentricity of the cavity has become a key issue.