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用X-射线衍射(XRD)、俄歇电子能谱(AES)和X-光电子能谱(XPS)的方法对N+B离子注入层的相组成、元素的分布和元素的结合状态进行了综合考察。结果表明:注入层是由基体中原有的α-Fe、Fe_3C相和注入过程中新生成的六方BN相和ε-Fe_2N-Fe_3N相组成的。另外,在注入层表面还有一层石墨型结构的碳膜存在。
The phase composition, elemental distribution and elemental bonding of the N + B ion implanted layer were synthesized by X-ray diffraction (XRD), Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) Inspected The results show that the injection layer consists of the original α-Fe and Fe_3C phases in the matrix and the newly formed hexagonal BN and ε-Fe_2N-Fe_3N phases during the implantation process. In addition, there is a graphite film on the surface of the implanted layer.