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本文介绍了一种量程较宽的真空标准装置。 6.7 × 10-3~1.3 × 102Pa范围采用一级膨胀法.1.3 × 102~3.7 × 103Pa范围采用与U型压力计直接比对.叙述了装置的原理、结构、定量传递阀的设计和隔断阀的选择。此外,还介绍了油柱高度.校准室和定量传递阀容积的测定方法。 经过对装置参数的测量和误差分析,以及分别用FB-1型标准电离规和电容薄膜规作为参考规,前后用本装置与麦氏计和高真空膨胀法装置比对,本装置在 6.3 × 10-3~3.7 × 103Pa范围的综合不确定度不大于±3%。 本装置为一等真空标准装置,可用于对低真空和中真空规进行检定和测试.
This article describes a wide range of vacuum standard devices. 6.7 × 10-3 ~ 1.3 × 102Pa range using a expansion method. 1.3 × 102 ~ 3.7 × 103Pa range and U-type pressure gauge directly compared. Describes the device’s principle, structure, quantitative transfer valve design and the choice of isolation valve. In addition, the column height is introduced. Calibration chamber and quantitative transfer valve volume measurement method. After the device parameters of the measurement and error analysis, and respectively with the FB-1 standard ionization gauge and capacitance film gauge as a reference gauge, before and after the device with the Maxwell meter and high vacuum expansion device comparison, the device in 6. The comprehensive uncertainty in the range of 3 × 10-3 ~ 3.7 × 103Pa is not more than ± 3%. This device is a first-class vacuum standard device that can be used to test and test low and medium vacuum gauges.