一、前言在半导体元器件制作工艺中,外延工艺是直接影响半导体元器件性能的重要环节,而外延加热体——基座,则对外延片质量起重要作用。我厂从六九年开始搞外延以来,先后采用了硅,包硅、包碳代硅石墨做基座。近来,我厂在沈阳金属研究所的帮助下,试用了热解石墨涂层做为外延基座。通过二年来的实践,我们认为热解石墨是一种较为理想的基座材料。它的使用显著减少了品体缺陷和有害杂质对半导体器件的影响。为完美外延工艺和半导体器 I. Introduction In the semiconductor components manufacturing process, the epitaxial process is a direct impact on the performance of semiconductor components an important part of the epitaxial heating body - the base, then the quality of the epitaxial sheet plays an important role. I plant from the beginning of extension in 1969, has adopted a silicon, including silicon, silicon-based package made of carbon graphite base. Recently, I plant with the help of Shenyang Institute of Metal, the pyrolysis graphite coating as a trial extension of the base. After two years of practice, we believe that pyrolytic graphite is an ideal base material. Its use significantly reduces the impact of body defects and unwanted impurities on the semiconductor device. Perfect for epitaxial process and semiconductor devices