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考察钨含量和摩擦条件对掺钨DLC涂层摩擦性能的影响。结果发现:随着钨含量的增加,DLC涂层摩擦系数明显增加;钨含量为3.1%(原子分数)的掺钨DLC涂层的耐磨性最好。在干摩擦条件下,低钨含量的DLC涂层摩擦系数随着载荷的增加而有所增加,高钨含量的DLC涂层在高载荷时具有较低的摩擦系数;高钨含量的DLC涂层的摩擦系数随着转速的增加而增加,但转速对纯DLC涂层的摩擦系数影响很小。掺钨DLC涂层的磨损主要是由Si3N4球压入试样表面时涂层在变形过程中的微观断裂和剥落引起的。
The effect of tungsten content and friction condition on the tribological properties of tungsten-doped DLC coatings was investigated. The results show that with the increase of tungsten content, the friction coefficient of DLC coatings increases obviously. The wear resistance of tungsten-doped DLC coatings with tungsten content of 3.1% (atomic fraction) is the best. Under dry friction conditions, the friction coefficient of DLC coating with low tungsten content increases with the increase of load, while DLC coating with high tungsten content has lower friction coefficient at high load. DLC coating with high tungsten content The friction coefficient increases with the increase of rotational speed, but the rotational speed has little effect on the friction coefficient of pure DLC coating. The wear of tungsten-doped DLC coating is mainly caused by the microscopic rupture and peeling of the coating during the deformation process when the Si3N4 balls are pressed into the surface of the sample.