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一、前言廉价计算机的出现使四探针测量系统的性能显著提高。图1(略)是一个薄层电阻测绘系统,它包括一台电阻率自动测试仪,一台 D.E.C.LSI11/73型计算机和双磁盘驱动器。在电阻率测试仪上,将被测半导体片
I. INTRODUCTION The advent of cheap computers dramatically improves the performance of the four-probe measurement system. Figure 1 (omitted) is a sheet resistance mapping system, which includes an automatic resistivity tester, a D.E.C. LSI 11/73 type computer and dual-disk drive. On the resistivity tester, the semiconductor chip to be measured