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本文介绍了测量介质薄膜消光系数K的衰减全反射方法。计算表明,K可测至5×10~(-5)。它适用于介质薄膜的弱吸收测量。氧化物薄膜,如氧化锆、氧化钛等实测的消光系数为K=2×10~(-4)。本文还讨论了影响测量灵敏度、精度的因素。由测得的S—和P—偏振光的反射率Rs和Rp同时确定薄膜的消光系数K和厚度d。
This paper introduces the attenuated total reflection method of measuring the extinction coefficient K of the dielectric thin film. Calculations show that K can be measured to 5 × 10 ~ (-5). It is suitable for the weak absorption measurement of dielectric films. The extinction coefficient of the oxide films such as zirconia and titania is K = 2 × 10 -4. This article also discusses the factors that affect the measurement sensitivity and accuracy. The extinction coefficient K and the thickness d of the film were determined simultaneously from the measured reflectances Rs and Rp of S- and P-polarized light.