多晶硅制造过程中产生的污泥含有更多氯有机硅，如果处理不当，会严重危害环境。残留物主要来自主要系统为氯化硅、氰化硅、三氯氯化硅、高氯和金属氯的氢设备，其中废物占 20%，氯仿占 79.5%，其余占0.5%。在大多数情况下，各国的污泥废料处理都采用干燥、烹饪的方法，较厚的滤芯采用单一、易于使用、处理效率低下、压降高和生产成本高的方法。因此，多层硅生产中砂浆形成方法的研究是行业关注的主要问题，也是保证硅结晶度正确生产和维护环境的重要方法。本文主要分析多晶硅生产中渣浆处理工艺改造。“,”The sludge produced in the process of polysilicon manufacturing contains more chlorosiloxane. If it is not handled properly, it will seriously harm the environment. The residue mainly comes from the hydrogen equipment with main systems of silicon chloride, silicon cyanide, silicon trichloride, high chlorine and metal chlorine, of which 20% is waste, 79.5% is chloroform, and 0.5% is the rest. In most cases, the methods of drying and cooking are used in the treatment of sludge waste in various countries. The thicker filter element is single, easy to use, low treatment efficiency, high pressure drop and high production cost. Therefore, the research of mortar forming method in multi-layer silicon production is the main concern of the industry, and it is also an important method to ensure the correct production of silicon crystallinity and maintain the environment. This paper mainly analyzes the transformation of slag slurry treatment process in polysilicon production.