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该文叙述了影响磁盘伺服图形光刻机主轴转速误差的主要来源,分析了主轴稳速系统是实现光刻机均匀刻录不可缺少的重要环节,提出了提高主轴稳速精度具体设计方案。
This paper describes the main sources that affect the spindle speed error of the disk servo pattern lithography machine. The analysis of the spindle steady speed system is an indispensable and important link in realizing the uniform recording of the lithography machine. The specific design scheme to improve the precision of spindle steady speed is put forward.