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设计制作了一种应用于微型聚合酶链式反应(PCR)芯片的微加热器。然后按照PCR循环温度的要求,利用该加热器进行了PCR温度实验。微加热器采用与MEMS工艺兼容的溅射方法在Si基上制作,微加热器材料为金属Pt。通过控制施加电压大小及时间,进行了变性温度、退火温度和延伸温度实验。结果表明:在25 V和32 V电压控制下的温升速度分别为0.68℃/s和1.23℃/s。在断电自然冷却下的降温速度均达到1℃/s。在一个PCR循环周期中每个反应仓的平均功耗为50 mW,最大功耗80 mW,整个10 mm×10 mm芯片的最大功耗为0.96 W。完成第一次PCR温度循环需要220 s,之后的每次循环仅需要175 s。
Design and manufacture of a micro-polymerase chain reaction (PCR) chip micro-heater. Then according to the requirements of PCR cycle temperature, using the heater for PCR temperature experiments. The micro-heater is fabricated on a Si-based substrate using a sputtering process that is compatible with MEMS processes. The microheater material is metal Pt. By controlling the size and time of applied voltage, experiments of denaturation temperature, annealing temperature and extension temperature were carried out. The results show that the rate of temperature rise under the voltage of 25 V and 32 V is 0.68 ℃ / s and 1.23 ℃ / s, respectively. In cooling off the natural cooling rate reached 1 ℃ / s. The average power dissipation per bin for a PCR cycle is 50 mW, with a maximum power dissipation of 80 mW and a maximum power dissipation of 0.96 W for a full 10 mm × 10 mm chip. It takes 220 s to complete the first PCR temperature cycle and only 175 s after each cycle.