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主要研究内容是对固着磨料工艺加工的碳化硅反射镜光学表面进行高频频段的评价。从微观模型入手对表面粗糙度进行了计算机仿真,并将模拟结果与实测结果进行了对比,针对使用不同规格的丸片加工碳化硅反射镜,其表面粗糙度的结果实验值与理论值的偏差比分别为5.97%,3.19%,3.59%,37.37%,并详细分析了出现偏差的可能原因。最后使用分形理论分析了固着磨料工艺加工后获得的光学表面,由此得出固着磨料工艺很容易快速获得较为光滑的光学表面,非常适合于快速表面成形及在较大面形误差的情况下获得较低的表面粗糙度。
The main research content is to evaluate the high frequency band of the silicon carbide mirror optical surface which is fixed with abrasive technology. Starting from the microscopic model, the surface roughness was simulated by computer, and the simulation results were compared with the measured results. For the silicon carbide mirrors with different specifications of the pellets, the deviation of the experimental value from the theoretical value The ratios were 5.97%, 3.19%, 3.59% and 37.37%, respectively. The possible reasons for the deviation were analyzed in detail. Finally, the fractal theory is used to analyze the optical surface obtained after the fixed abrasive processing, which shows that the fixed abrasive technology can easily and quickly obtain a smoother optical surface, which is very suitable for rapid surface forming and obtaining in the case of large surface shape error Lower surface roughness.