论文部分内容阅读
一、引言静态光电显微镜在国内外的精密测试领域中占有重要地位。目前,我国生产的该类产品,大多用于线纹尺的制造和检定工作中,而国外有的产品还具有对角度测量、球体定位及对工件轮廓瞄准等功能。在光电信号的处理与仪器输出信号的选取方面,国內的产品大多采用光电信号的一次谐波分量作为输出信号,即以基波信号幅值的大小(或
I. Introduction Static light microscope in the field of precision testing occupies an important position. At present, most of the products produced in China are used in the manufacture and verification of wire ruler. Some products abroad also have such functions as angle measurement, sphere positioning and aiming at the contour of the workpiece. In optoelectronic signal processing and equipment output signal selection, the domestic products mostly use the first harmonic component of the optical signal as the output signal, that is, the amplitude of the fundamental signal (or