The penetration depth and concentration distribution of implanted ions have beenstudied for low energy heavy ions implanted in the dry seeds of plant,such as peanut, mungbean, sunflower, wheat and radish seeds, etc. by SEM+EDS. The results show that the maximumpenetration depth is about 12 for V+ with an energy 200 keVimplanted in cotyledon of the peanut, 18,5, 20 for V2+ with 90 keV implanted in sunflower,wheat, radish seeds, respectively. Thepenetration depth of implanted Cu2+ with 80 keV is about 90 in the remainder funicle derivativeof the mung bean seeds. The experimental result of the maximumpenetration depth of implanted V+in the peanut seeds was compared with the calculated value of the TRIM95.