S_(MDX)-1P型微区分析扫描电子显微镜具有好的分辩率和深的焦深,图像层次分明,主体感强,它除了能直接观察样品的表面形貌外,还可对样品中感兴趣的区域进行定性定量分析,所以在金属、地质、半导体、材料、医学、生物等领域中得到广泛的应用。基本原理: 采用从电子枪发射出来的电子经两个电磁透镜聚焦成很细的电子束,利用此电子束与样品相互作用,激发产生很多信息如二次电子、背散射电子、吸收电子、 S_ (MDX) -1P-based micro-area scanning electron microscopy has good resolution and depth of focus, the image clearly structured, the main sense of strong, it can not only directly observe the surface morphology of the sample, but also the sense of the sample Interest area qualitative and quantitative analysis, so in the metal, geological, semiconductor, materials, medicine, biology and other fields are widely used. Fundamentals: The electron emitted from the electron gun is focused by two electromagnetic lenses into a fine electron beam. By using this electron beam to interact with the sample, a lot of information such as secondary electrons, backscattered electrons, absorbed electrons,