对在极小的空间范围内,既可以进行形貌分析,又可以进行成分分析的问题,本文提供仅仅依靠两个电极来进行表面分析的办法。在两电极的周围加入屏蔽套,获得了俄歇电子出现势能谱图,并提出了提高二极式结构俄歇电子出现势谱性能的各种方法,使其具有应用前景。 For problems that allow for both topography and compositional analysis in a very small space, this article provides a method of surface analysis that relies solely on two electrodes. Shielding sleeve was added around the two electrodes to get the potential energy spectrum of Auger electron. Various methods to improve the potential performance of Auger electron in the bipolar structure were proposed, which made it have potential application.