线型间-甲酚-甲醛树脂是正性光刻胶的成膜剂或粘附剂,在正胶中除了有成膜作用外还能在显影液中与邻迭氮萘醌磺酸酯型光敏剂偶合而提高未曝光区正胶的耐碱性与耐腐蚀性。本文研究了树脂分子量大小对正胶抗化学试剂性能的影响。若树脂分子量太小,则正胶的耐碱性与耐腐蚀性就差,若分子量太大,则正胶的粘附性就差。数均分子量 Linear m-cresol-formaldehyde resin is a positive photoresist film-forming agent or adhesive, in addition to the positive film in addition to the film-forming effect in the developer can also be adjacent naphthoquinone naphthalene sulfonate type photosensitive Agent coupling to improve the non-exposed areas of the positive resistance to alkali and corrosion resistance. In this paper, the influence of the molecular weight of resin on the properties of positive resist chemicals was studied. If the resin molecular weight is too small, the positive resistance of the alkali and corrosion is poor, if the molecular weight is too large, the positive adhesion is poor. Number average molecular weight