激光打孔是激光在工业中最重要的应用,是目前加工小孔中不可缺少的一种激光加工方法,特别是对一些脆性材料如陶瓷、玻璃、蓝宝石、高温合金等。为了提高孔的加工质量,设计了专用的光学系统进行旋转打孔,利用皮秒激光器在蓝宝石和镍基单晶材料(DD6)上实现了无锥度打孔,孔的圆度高>95%,孔壁粗糙度Ra<1.2μm,锥度<1°,无重熔层和微裂纹。 Laser drilling is the most important application of laser in the industry. It is an indispensable laser processing method in the processing of small holes, especially for some brittle materials such as ceramics, glass, sapphire and superalloy. In order to improve the processing quality of the hole, a special optical system was designed for rotary drilling. The use of a picosecond laser to achieve taper-free drilling on sapphire and nickel-based single crystal material (DD6) Hole wall roughness Ra <1.2μm, taper <1 °, no remelt and micro-cracks.