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研制了一套过滤式阴极电弧沉积设备 ,并利用该设备成功地获得了类金刚石薄膜。扫描电镜分析表明 :获得的薄膜在硅基片上是光滑和致密的。喇曼光谱研究表明 ,这种薄膜是典型的无氢类金刚石薄膜。膜层的摩擦试验表明 :无氢类金刚石薄膜的摩擦系数较低 ,是一种理想的耐磨材料
A set of filter cathodic arc deposition equipment was developed and the diamond-like carbon film was successfully obtained. Scanning electron microscopy analysis showed that the obtained film was smooth and dense on a silicon substrate. Raman spectroscopy studies have shown that this film is a typical hydrogen-free diamond-like carbon film. Film friction test showed that: the hydrogen-free diamond-like carbon film has a low coefficient of friction and is an ideal wear-resistant material