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为进一步提高压电陶瓷微位移系统的定位精度,设计了一种以PA93高压运放器为核心的高精度、稳定性好的大功率压电陶瓷驱动电源。重点阐述了系统设计方案,并对其中的关键技术和特性功能进行了分析讨抡。实验结果表明,该驱动电源具有精度高、输出电流大、响应速度快、稳定性好的特点。当压电陶瓷等效容性负载为3μF时,能在1KHz内实现0V~10V到0V~100V的动态放大,电压输出精度可达0.1mV。
In order to further improve the positioning accuracy of piezoelectric microdisplacement system, a kind of high-power piezoelectric ceramic driving power source with high precision and good stability based on PA93 high-voltage op-amp was designed. The system design plan is mainly elaborated, and the key technologies and the functions of the system are analyzed and discussed. Experimental results show that the drive power with high precision, output current, fast response, good stability characteristics. When the equivalent capacitive load of the piezoelectric ceramic is 3μF, it can dynamically amplify 0V ~ 10V to 0V ~ 100V within 1KHz, and the voltage output accuracy can reach 0.1mV.