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日本明石制作所研制成高稳定电场发射式电子枪,这种电子枪的特点是采用碳化钛单晶代替传统的钨作为阴极,同时阳极采用电子轰击少、易产生气体的特殊构造,从而获得高辉度、稳定的发射电流。这种电子枪的研制成功,可大幅度提高制造超LSI(大规模集成电路)时所必须的电子束曝光装置、电子显微镜等的性能。 为使电子的发射聚束,以提高发射电流的稳定性,该公司将碳化钛单晶按一定的晶轴方向切出角
Japan’s Akashi Institute developed a high stability electric field emission gun, the characteristics of this electron gun is the use of titanium carbide instead of the traditional tungsten as a cathode, while the anode with less electron bombardment, easy to produce a special gas structure to obtain high brightness , Stable emission current. The successful development of such electron guns greatly improves the performance of electron beam exposure devices, electron microscopes and the like necessary for the manufacture of super LSIs. In order to make the electron emission bunching, in order to improve the stability of the emission current, the company will be titanium carbide crystal crystal axis by a certain direction cut angle