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真空室内金属粒子污染是降低激光薄膜性能的一个重要因素。采用高真空残余气体分析仪,对薄膜沉积过程中的气氛进行分析。发现由黄铜制作的加热灯架在工作时会分解出Zn,在这种条件下沉积薄膜,会使薄膜中掺入金属杂质,导致薄膜激光破坏阈值降低。采用表面分析技术对薄膜的组分进行分析,证实薄膜中锌杂质的存在。激光破坏实验证明,含有锌杂质的薄膜的破坏阈值明显降低。
Metal particle contamination in the vacuum chamber is an important factor in reducing the performance of laser films. Using a high-vacuum residual gas analyzer, the atmosphere during film deposition was analyzed. It is found that the heating lamp holder made of brass decomposes Zn during working. Depositing the film under such conditions causes the metal impurities in the film, resulting in a decrease of the laser damage threshold of the film. Surface analysis techniques were used to analyze the composition of the film, confirming the presence of zinc impurities in the film. Laser damage experiments show that the damage threshold of zinc-containing films is significantly reduced.