,Design and Characterization of a Top Cladding for Silicon-on-Insulator Grating Coupler

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An effective top cladding for silicon-on-insulator grating coupler is designed and the validity of the design is confirmed experimentally.The proposed double-layer silicon oxide/silicon nitride (SiO2/Si3N4) cladding demonstrates antireflection properties and affects a coupling strength of the grating structure.A coupling efiiciency of 65% is obtained after cladding layer deposition.
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