论文部分内容阅读
提出了一种用于压力传感器的温度漂移补偿新方法。该压力传感器中包含了两个灵敏度不同的敏感电桥，它们被制作于同一芯片不同厚度的膜片上。所采用的一种电阻设置新形式，可有效节省芯片面积。通过双桥间的互补，同时消除了压力传感器的热零点漂移和热灵敏度漂移，文中给出了温度漂移补偿的具体算法及相应的实验结果。
A new method of temperature drift compensation for pressure sensor is proposed. The pressure sensor contains two different sensitive sensitivity bridge, which are made in the same chip of different thickness of the diaphragm. The use of a new form of resistance set can effectively save the chip area. Through the double bridge between the complementary, while eliminating the pressure sensor thermal zero drift and thermal sensitivity drift, the paper gives the temperature drift compensation algorithm and the corresponding experimental results.