论文部分内容阅读
通过磁控溅射法制备了不同含量SiC的铝基复合薄膜。采用XRD、SEM、TEM和纳米探针分析了薄膜的微观结构和力学性能。结果表明:SiC以纳米级别的粒子态弥散分布于Al基体甚至以原子或者分子的状态固溶于Al的晶体中。薄膜的硬度在仅含0.78at%SiC时就可达到3GPa,约为纯Al薄膜的两倍。随SiC含量的提高,复合薄膜的硬度逐步提高,在SiC含量为8.84 at%时,复合薄膜的硬度达到5.6 GPa后,随SiC含量的进一步提高,该薄膜结构非晶化,硬度逐步降低。
Aluminum-based composite films with different content of SiC were prepared by magnetron sputtering. The microstructure and mechanical properties of the films were analyzed by XRD, SEM, TEM and nano-probes. The results show that SiC is diffused and distributed in the Al matrix with nano-scale particle state and even dissolves in the Al crystal with atomic or molecular state. The hardness of the film can reach 3 GPa at only 0.78 at% SiC, which is about double the pure Al film. With the increase of SiC content, the hardness of the composite films gradually increases. When the SiC content is 8.84 at%, the hardness of the composite films reaches 5.6 GPa. With the further increase of the SiC content, the film structure is amorphized and its hardness decreases gradually.