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荷能离子对单元素的溅射已有较好的理论解释,但是对多元合金或化合物溅射的研究才开始不久,目前尚无一个能够成功地解释实验现象的理论。 溅射后合金样品近表面组成的改变,是一种有趣的实验现象。实验中发现三元合金的现象比二元合金更为复杂,例如,元素的近表面改变与溅射离子的能量有关,这是用现有的择优溅射理论无法解释的。为研究这种现象,我们选取了Si(Co,Ta)三元合金,在分别用20到
There is a good theoretical explanation for the single element sputtering by the energy ion, but the research on the sputtering of the multi-element alloy or compound is not long before. So far there is no theory that can successfully explain the experimental phenomena. Changes in the near-surface composition of the alloy sample after sputtering are interesting experimental phenomena. The experiment found that the ternary alloy is more complicated than the binary alloy. For example, the near-surface change of the element is related to the energy of the sputtered ions, which can not be explained by the existing preferential sputtering theory. To study this phenomenon, we selected Si (Co, Ta) ternary alloy, respectively, with 20 to