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本文分析了影响极高真空规测量下限的几个限制因素，介绍国外极高真空测量技术的最新发展状况。阐述了具有贝塞尔盒离子能量过滤器的Ａ－Ｔ电离规、球栅型离子谱电离规、离子引出型电离规、ＣＳＬ静电透镜电离规等的结构及性能，并分析了它们的优缺点。介绍了利用激光电离技术测量极高真空度的最新动态。最后提出一种极高真空鞍场规，与上述几种电离规相比，具有电极尺寸小、灵敏度高、吸放气率低等优点。用Ｍｏｎｔｅ－Ｃａｒｌｏ模拟方法计算了极高真空鞍场规的电场分布、电子轨迹和灵敏度。
This article analyzes several limiting factors that affect the lower limit of vacuum gauges, and introduces the latest developments of the very high vacuum gauges in foreign countries. The structure and performance of A-T ionization gauge, ball grid ionization ionization gauge, ionization ionization gauge and ionization gauge of CSL electrostatic lens with Bessel ion energy filter are described, and their advantages and disadvantages are analyzed. . The latest developments in measuring extremely high vacuum using laser ionization techniques are introduced. Finally, an extremely high vacuum saddle field gauge is proposed, which has the advantages of small electrode size, high sensitivity and low absorption and exhaustion rate as compared with the above several ionization gauges. The electric field distribution, electron trajectory and sensitivity of the ultrahigh vacuum saddle gauge were calculated by Monte-Carlo simulation.