论文部分内容阅读
化学气相沉积ZnSe与ZnS晶体结构及物理性能近似,但原生ZnS在6.2μm处存在由Zn-H络合物引起的明显的吸收峰,其中的H来源于未分解的含H反应气体,而原生ZnSe则无此现象。比较分析它们的沉积条件(温度、压力)以及反应气性质后认为:ZnSe相对较高的沉积温度和反应气之一的H_2Se低的分解温度是主要的原因,同时高温可减弱含H缺陷对ZnS光学性能的影响;其次,ZnSe沉积中压力低使反应物浓度降低且有利于未参与反应的H2Se气体返回主气流减少了ZnSe晶体中Zn-H络合物的含量。
The structure and physical properties of ZnSe and ZnS crystals by chemical vapor deposition are similar, but the obvious absorption peak of Zn-H complex exists in the native ZnS at 6.2μm, of which the H originates from the undecomposed H-containing reaction gas, ZnSe is no such phenomenon. A comparative analysis of their deposition conditions (temperature, pressure) and the nature of the reactant gas suggests that the relatively high deposition temperature of ZnSe and the low decomposition temperature of H 2 Se, one of the reactant gases, are the main causes, while the high temperatures reduce the effect of H-containing defects on ZnS Secondly, the low pressure in the ZnSe deposition reduces the concentration of the reactants and favors the return of the unreformed H2Se gas to the main gas stream, which reduces the Zn-H complex content in ZnSe crystals.