Thin calcium phosphate coatings on titanium alloy substrates wereprepared by Ar+ ion beam assisted deposition (IBAD) from hydroxyl-poly-calciumsodium phosphate (HPPA) target. The coatings were analyzed by XRD, FTIR, XPS.These analyses revealed that the as-deposited films were amorphous or no apparentcrystallinity. No distinct absorption band of the hydroxyl group was observed in FTIRspectra of the coatings but new absorption bands were presented for CO3-2. Thecalcium to phosphorous ratio of these coatings in different IBAD conditions variedfrom 0.46 to 3.36.