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如何将各种材料镀制成所需要的薄膜,这是镀膜技术和薄膜光学的基本问题之一。所谓镀膜工艺主要指蒸镀技术和监控方法。下面着重介绍国外蒸镀技术和监控方法的发展动向。一、蒸镀技术关于蒸镀技术,文献上记载甚多,有化学浸蚀法、溅射蒸镀法、真空热蒸发法、离子蒸镀之分;也有从运动能量出发,对生成的各种薄膜进行分类(见表1)。
How to make a variety of materials required to make the film, which is coating technology and film optics one of the basic issues. The so-called coating process mainly refers to evaporation technology and monitoring methods. The following focuses on the development of foreign evaporation technology and monitoring methods. First, the evaporation technology On the evaporation technology, documented in the literature, there are chemical etching method, sputtering method, vacuum thermal evaporation method, the points of ion deposition; also starting from the kinetic energy of the generated Films are classified (see Table 1).