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本文旨在研究用于加速器大功率rf系统中氧化铝rf窗的击穿问题。击穿表现为穿孔和热断裂,它们分别经常发生于S波段rf脉冲系统中和UHF连续波系统中;由于次级电子倍增效应产生的轰击作用,使得氧化铝表面加热,同时使氧化铝发光,从而导致了穿孔和断裂。现已弄清楚:在氧化铝窗上涂复TiN涂层即可抑制次级电子倍增效应,而窗耐击穿的可靠性则取决于氧化铝陶瓷的显微结构。
This article aims to investigate the breakdown of alumina rf windows used in accelerator high power rf systems. Breakthrough is perforated and thermal fracture, which occur frequently in the S-band rf pulse system and in the UHF continuous wave system respectively. Due to the bombardment effect caused by the secondary electron doubling effect, the surface of the alumina is heated and the alumina is made to glow. Resulting in perforation and fracture. It has now been clarified that the secondary electron multiplication effect can be suppressed by coating a TiN coating on the alumina window, whereas the reliability of the window breakdown resistance depends on the microstructure of the alumina ceramic.