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讨论了隧道声显微镜(TAM)的三种工作模式,即相互作用力-隧道间距模式、改进的STM测量模式和AFM测量模式,研究了它们的工作机理。建立了一个探针-样品相互作用的模型,理论分析了相互作用力与隧道间距的关系,计算结果与实验结果一致,该结果对于研制TAM实验系统和探针制备等具有指导意义.
The three working modes of tunnel acoustic microscope (TAM) are discussed, that is, interaction force - tunnel spacing mode, improved STM measurement mode and AFM measurement mode, and their working mechanism is studied. A model of probe-sample interaction was established, and the relationship between interaction force and tunnel spacing was analyzed theoretically. The calculated results are consistent with the experimental results. The results are instructive for the development of TAM experimental system and probe preparation.